Ì«Ñô¼¯ÍÅtyc97281

ÌØÖÔìøÌå(Specialty gas )ÖØÒªÓÐ SiH4¡¢PH3¡¢B2H6¡¢A8H3¡¢CL¡¢HCL¡¢CF4¡¢NH3POCL3¡¢SIH2CL2¡¢ SIHCL3¡¢NH3¡¢BCL3¡¢SIF4¡¢CLF3¡¢CO¡¢C2F6¡¢N2O¡¢F2¡¢HF¡¢HBR¡¢SF6¡­¡­µÈµÈ´ó²¿ÃÅÊÇÇÖÊ´ÐÔ¡¢¶¾ÐÔ¡¢µã»ðÐÔµÄÆøÌå¡£¡£¡£¡£¡£¡£

Õë¶ÔÇÖÊ´ÐÔ¡¢¶¾ÐÔ¡¢µã»ðÐÔµÄÆøÌ壬£¬£¬£¬£¬Í¨³£Éè¼Æ½«¸Ôì¿ÖÃÓÚÌØÆø¹ñ(Gas Cabinet)ÄÚ£¬£¬£¬£¬£¬ÔÙͨ¹ý¹Ü·½«ÆøÌ幩¸øÖÁÏÖ³¡×ó½üµÄ·§ÃÅÏä(VMB, Valve Manifold Box)£¬£¬£¬£¬£¬¶øºóÔÙ½øÈëÔì³Ì»ų́µÄʹÓõã(POU, Point of Use)£¬£¬£¬£¬£¬ÓÚ½øÈë»ų́ǻÌå֮ǰ£¬£¬£¬£¬£¬»áÓжÀÁ¢µÄÆøÌå½ÚÔìÅÌ(GB, Gas Box)ÓëÔì³Ì½ÚÔìÄ£¿£¿£¿£¿£¿éÁª»ú£¬£¬£¬£¬£¬ÒÔÖÊÁ÷Á÷Á¿¼Æ½ÚÔìÆ÷(MFC, Mass Flow Controller)½øÐÐÁ÷Á¿Ö®½ÚÔìÓë½øÆøµÄ»ìºÏ±ÈÀý½ÚÔ죬£¬£¬£¬£¬Í¨³£´ËÆøÌå½ÚÔìÅ̲»ÊôÓÚ³§ÎñϵͳµÄÉè¼ÆÁìÓò£¬£¬£¬£¬£¬¶øÊǹéÊôÔì³Ì»ų́É豸µÄÒ»²¿·Ý¡£¡£¡£¡£¡£¡£Í¨³£µÄ¶èÐÔÆøÌåÔòÊÇÒÔÊ¢¿ªÊ½µÄÆøÆ¿¼Ü(Gas Rack)Óë·§ÃÅÅÌ(VMP, Valve Manifold Panel)½øÐй©¸ø¡£¡£¡£¡£¡£¡£

±¾ÆªÄÚÈÝÆðÔ´ÓÚÍøÂ磬£¬£¬£¬£¬ÈçÓÐÇÖȨ£¬£¬£¬£¬£¬ÇëÁªÏµÉ¾³ý